Agilent 41501B SMU and Pulse Generator Expander
HPSMU (High Power SMU) Specifications
Output Terminal/Connection:
Dual triaxial connectors, Kelvin (remote
sensing)
Voltage Range, Resolution, and Accuracy (HPSMU)
Voltage Set.
Set. Accuracy
Meas. Meas. Accuracy
Reso.
Max.
Range
2 V
Reso.
Current
Voltage/Current Compliance
(Limiting):
100 μV (0.03ꢀ%+00 μV)
2 μV
(0.02ꢀ%700 μV)
(0.02ꢀ%2 mV)
(0.02ꢀ%3 mV)
(0.03ꢀ%5 mV)
(0.035ꢀ%10 mV)
1 A
1 A
500 mA
125 mA
50 mA
20 V
40 V
100 V 5 mV
200 V 10mV
1 mV
2 mV
(0.03ꢀ%4 mV)
(0.03ꢀ%7 mV)
(0.04ꢀ%15 mV)
(0.045ꢀ%30 mV)
20 μV
40 μV
100 μV
200 μV
Voltage: 0 V to 200 V
Current: 1 pA to 1 A
Compliance Accuracy: Same as the current
(voltage) settling accuracy.
HPSMU Supplemental Information:
Maximum allowable cable resistance when
using Kelvin connection:
Current Range, Resolution, and Accuracy (HPSMU)
Current Set.
Set.Accuracy
Meas. Meas. Accuracy
Reso.
Max. V
Range
1 nA
10 nA 1 pA
100 nA 10 pA
1 μA
Reso.
100 fA
Force: 0.7 Ω (100 mA to 1 A)
Force: 10 Ω (≤100 mA)
(0.5ꢀ%3 pA%2 fAꢁVout)
(0.5ꢀ%7 pA%20 fAꢁVout)
(0.12ꢀ%50 pA%200 fAꢁVout) 100 fA
10 fA
10 fA
(0.5ꢀ%3 pA%2 fAꢁVout)
(0.5ꢀ%5 pA%20 fAꢁVout)
(0.1ꢀ%30 pA%200 fAꢁVout) 200 V
(0.1ꢀ%200 pA%2 pAꢁVout) 200 V
200 V
200 V
Sense: 10 Ω
Typical voltage source output resistance
(Force line/non-Kelvin connection): 0.2 Ω
Voltage measurement input resistance/
current source output resistance:
≥1013 Ω (1 nA range)
100 pA (0.12ꢀ%400 pA%2 pAꢁVout) 1 pA
10 μA 1 nA
100 μA 10 nA
(0.12ꢀ%5 nA%20 pAꢁVout)
(0.12ꢀ%40 nA%200 pAꢁVout) 100 pA
10 pA
(0.1ꢀ%3 nA%20 pAꢁVout)
(0.1ꢀ%20 nA%200 pAꢁVout 200 V
(0.1ꢀ%300 nA%2 nAꢁVout) 200 V
200 V
1 mA
100 nA (0.12ꢀ%500 nA%2 nAꢁVout) 1 nA
10 mA 1 μA
100 mA 10 μA
1 A
(0.12ꢀ%4 μA%20 nAꢁVout)
(0.12ꢀ%50 μA%200 nAꢁVout) 100 nA
100 μA (0.5ꢀ%500 μA%2 μAꢁVout) 1 μA
10 nA
(0.1ꢀ%2 μA%20 nAꢁVout)
(0.1ꢀ%30 μA%200 nAꢁVout)
(0.5ꢀ%300 μA%2 μAꢁVout)
200 V
Current compliance setting accuracy for
opposite polarity:
1
2
1 nA to 10 nA range: V/I setting
accuracy 12ꢀ of range
1 200 V (Iout ≤50 mA), 100 V (50 mA<Iout≤100 mA)
2 200 V (Iout ≤50 mA), 100 V (50 mA<Iout≤125 mA), 40 V (125 mA<Iout≤500 mA), 20 V (500 mA<Iout≤1 mA)
100 nA to 1 A range: V/I setting
accuracy 2.5ꢀ of range
Vout is the output voltage in volts. Iout is the output current in amps. For example, accuracy specifications
are given as ꢀ of set/measured value (0.1ꢀ) plus offset value (30 pA%200 fAꢁVout) for the 100 nA range.
The offset value consists of a fixed part determined by the set/measurement range and a proportional part
that is multiplied by Vout.
Current (mA)
1000
500
HPSMU measurement
and output range
125
50
-200
-100
-40 -20
20
40
100
200
-50
-125
Voltage (V)
-500
-1000
4
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