Agilent 4156C Semiconductor Parameter Analyzer
Output Terminal/Connection:
Single triaxial connector, non-Kelvin
(no remote sensing)
MPSMU (Medium Power SMU) Specifications
Voltage Range, Resolution, and Accuracy (MPSMU)
Voltage/Current Compliance
(Limiting):
Voltage Set
Set Accuracy
Meas. Meas. Accuracy
Reso.
Max.
Range
2 V
Reso.
Current
100 μV (0.03ꢀ%+00 μV%0.3ꢁIout)
2 μV
(0.02ꢀ%700 μV%0.3ꢁIout) 100 mA
The SMU can limit output voltage or
current to prevent damaging the device
under test.
20 V
40 V
100 V 5 mV
1 mV
2 mV
(0.03ꢀ%4 mV%0.3ꢁIout)
(0.03ꢀ%7 mV%0.3ꢁIout)
(0.04ꢀ%15 mV%0.3ꢁIout)
20 μV
40 μV
100 μV
(0.02ꢀ%2 mV%0.3ꢁIout)
(0.02ꢀ%3 mV%0.3ꢁIout)
(0.03ꢀ%5 mV%0.3ꢁIout)
100 mA
1
2
Voltage: 0 V to 100 V
1 100 mA (Vout ≤20 V), 50 mA (20 V<Vout ≤40 V)
Current: 1 pA to 100 mA
Compliance Accuracy: Same as the current
(voltage) settling accuracy.
2 100 mA (Vout ≤20 V), 50 mA (20 V<Vout ≤40 V), 20 mA (40 V<Vout≤100 V)
MPSMU Supplemental Information:
Typical voltage source output
resistance: 0.3 Ω
Voltage measurement input
resistance/current source output resis-
tance: ≥1013 Ω (1 nA range)
Current compliance setting accuracy for
opposite polarity:
1 nA to 10 nA range: V/I setting accuracy
12ꢀ of range
100 nA to 100 mA range: V/I setting
accuracy 2.5ꢀ of range
Current Range, Resolution, and Accuracy (MPSMU)
Current Set
Set Accuracy
Meas. Meas. Accuracy
Reso.
Max. V
Range
1 nA
10 nA 1 pA
100 nA 10 pA
1 μA
Reso.
100 fA
(0.5ꢀ%3 pA%2 fAꢁVout)
(0.5ꢀ%7 pA%20 fAꢁVout)
(0.12ꢀ%50 pA%200 fAꢁVout) 100 fA
10 fA
10 fA
(0.5ꢀ%3 pA%2 fAꢁVout)
(0.5ꢀ%5 pA%20 fAꢁVout)
(0.1ꢀ%30 pA%200 fAꢁVout) 100 V
(0.1ꢀ%200 pA%2 pAꢁVout) 100 V
100 V
100 V
100 pA (0.12ꢀ%400 pA%2 pAꢁVout) 1 pA
10 μA 1 nA
100 μA 10 nA
(0.12ꢀ%5 nA%20 pAꢁVout)
(0.12ꢀ%40 nA%200 pAꢁVout) 100 pA
10 pA
(0.1ꢀ%3 nA%20 pAꢁVout)
(0.1ꢀ%20 nA%200 pAꢁVout 100 V
(0.1ꢀ%300 nA%2 nAꢁVout) 100 V
100 V
1 mA
100 nA (0.12ꢀ%500 nA%2 nAꢁVout) 1 nA
10 mA 1 μA
100 mA 10 μA
(0.12ꢀ%4 μA%20 nAꢁVout)
(0.12ꢀ%50 μA%200 nAꢁVout) 100 nA
1 100 V (Iout ≤20 V), 40 V (20 mA<Iout≤50 mA), 20 V (50 mA<Iout≤100 mA)
10 nA
(0.1ꢀ%2 μA%20 nAꢁVout)
(0.1ꢀ%30 μA%200 nAꢁVout)
100 V
1
Current (mA)
100
Vout is the output voltage in volts. Iout is the output current in amps.
For example, accuracy specifications are given as ꢀ of set/measured
value (0.1ꢀ) plus offset value (30 pA%200 fAꢁVout) for the 100 nA range.
The offset value consists of a fixed part determined by the set/
measurement range and a proportional part that is multiplied by Vout.
MPSMU measurement
and output range
50
20
-100
-40 -20
20 40
100
Voltage (V)
-20
-50
-100
VSU and VMU specifications are common to both the 4155C and 4156C
VSU (Voltage Source Unit)
Specifications
VMU (Voltage Monitor Unit)
Specifications
VMU Measurement Range,
Resolution, and Accuracy:
Voltage Meas. Meas.
VSU Output Range:
VMU Differential Mode Range,
Resolution, and Accuracy:
Range
2 V
20 V
Reso. Accuracy
Voltage Meas. Meas. Accuracy
Range Reso.
2 μV
(0.02ꢀ%200 μV)
(0.02ꢀ%1 mV)
Diff V
Meas. Meas.
(0.05ꢀ of setting %10 mV)1
20 μV
20 V
1 mV
Range Reso.
Accuracy
1
Specification is applicable under no load current.
Max. Output Current: 100mA
0.2 V 0.2 μV
(0.03ꢀ%10 μV%0.3 μVꢁVi)
(0.02ꢀ%100 μV%3 μVꢁVi)
VMU Supplemental Information:
Input Impedance: ≥1 GΩ
2 V
2 μV
Max. Common Mode Voltage: 20 V
Note: Vi is the input voltage of VMU2 in volts.
For example, accuracy specifications are given as
of set/measured value (0.02ꢀ) plus offset value (100
μV%3 μVꢁVi) for the 2 V range. The differential mode
offset value consists of a fixed part determined by the
measurement range and a proportional part that is
multiplied by Vi.
Input leakage current (@0 V): ≤500 pA
Measurement noise: 0.01ꢀ of range (p-p)
(typical) when integration time is 10 PLC
Differential mode measurement noise:
0.005ꢀ of range (p-p) (typical) when
integration time is short.
VSU Supplemental Information:
Output resistance: 0.2 Ω (typical)
Maximum load capacitance: 10 μF
Maximum slew rate: 0.2 V/μs
Current limit: 120 mA (typical)
Output Noise: 1 mV rms (typical)
ꢀ
3
AGILENT [ AGILENT TECHNOLOGIES, LTD. ]
