Hardware
Specification Condition
The measurement and output accuracy are 3. Ambient temperature change less than
The “supplemental” information and
“typical” entries in the following speci-
fications are not warranted, but provide
useful information about the functions and
performance of the instruments.
specified at the rear panel connector termi-
nals when referenced to the Zero Check
terminal under the following conditions:
1. 23 °C 5 °C (double between 5 °C to
18 °C, and 28 °C to 40 °C if not noted
otherwise)
1 °C after auto calibration execution.
4. Integration time: medium or long
5. Filter: ON (for SMUs)
6. Kelvin connection (for HRSMU, HPSMU,
and GNDU)
7. Calibration period: 1 year
2. After 40 minutes warm-up
Agilent 4156C Precision Semiconductor Parameter Analyzer
Output Terminal/Connection:
HRSMU (High Resolution SMU) Specifications
Dual triaxial connectors, Kelvin (remote
sensing)
Voltage Range, Resolution, and Accuracy (HRSMU)
Voltage Set Reso.
Range
Set Accuracy
Meas.
Reso.
2 μV
20 μV
40 μV
100 μV
Meas. Accuracy
Max.
Current
Voltage/Current Compliance
(Limiting):
2 V
100 μV
1 mV
2 mV
5 mV
(0.02ꢀ%400 μV)
(0.02ꢀ%3 mV)
(0.025 ꢀ%6 mV)
(0.03ꢀ%15 mV)
(0.01ꢀ%200 μV)
(0.01ꢀ%1 mV)
(0.015ꢀ%2 mV)
(0.02ꢀ%5 mV)
100 mA
20 V
40 V
100 V
100 mA
The SMU can limit output voltage or
current to prevent damaging the device
under test.
1
2
1 100 mA (Vout ≤20 V), 50 mA (20 V<Vout≤40 V)
2 100 mA (Vout ≤20 V), 50 mA (20 V<Vout≤40 V), 20 mA (40 V<Vout≤100 V)
Voltage: 0 V to 100 V
Current: 100 fA to 100 mA
Compliance Accuracy: Same as the current
(voltage) settling accuracy.
Current Range, Resolution, and Accuracy (HRSMU)
Current Set
Set Accuracy
Meas. Meas. Accuracy
Reso.
1 fA
Max. V
HRSMU Supplemental Information:
Maximum allowable cable resistance when
using Kelvin connection
Range
Reso.
10 pA 10 fA
100 pA 10 fA
(4ꢀ%400 fA)1, 2
(4ꢀ%20 fA%1 fAꢁVout/100)1, 2 100 V
(4ꢀ%40 fA%10 fAꢁVout/100)1, 2 100 V
(4ꢀ%400 fA)1, 2
1 fA
10 fA
10 fA
(Force, Sense): 10 Ω
1 nA
100 fA
(0.5ꢀ%0.7 pA%1 fAꢁVout)2
(0.5ꢀ%4 pA%10 fAꢁVout)
(0.5ꢀ%0.4 pA%1 fAꢁVout)2
(0.5ꢀ%2 pA%10 fAꢁVout)
(0.1ꢀ%20 pA%100 fAꢁVout)
(0.1ꢀ%200 pA%1 pAꢁVout)
(0.05ꢀ%2 nA%10 pAꢁVout)
100V
100V
100V
100V
100V
Typical voltage source output resistance
(Force line/non-Kelvin connection): 0.2 Ω
Voltage measurement input resistance/
current source output resistance:
≥1015 Ω (10 pA range)
10 nA 1 pA
100 nA 10 pA
(0.12ꢀ%40 pA%100 fAꢁVout) 100 fA
1 μA
100 pA (0.12ꢀ%400 pA%1 pAꢁVout) 1 pA
10 μA 1 nA
100 μA 10 nA
(0.07ꢀ%4 nA%10 pAꢁVout)
(0.07ꢀ%40 nA%100 pAꢁVout) 100 pA (0.05ꢀ%20 nA%100 pAꢁVout) 100V
10 pA
Current compliance setting accuracy for
opposite polarity:
1 mA
10 mA 1 μA
100 mA 10 μA
100 nA (0.06ꢀ%400 nA%1 nAꢁVout) 1 nA
(0.04ꢀ%200 nA%1 nAꢁVout)
(0.04ꢀ%2 μA%10 nAꢁVout)
100V
100V
(0.06ꢀ%4 μA%10 nAꢁVout)
10 nA
10 pA to 10 nA range: V/I setting
accuracy 12ꢀ of range
3
(0.12ꢀ%40 μA%100 nAꢁVout) 100 nA (0.1ꢀ%20 μA%100 nAꢁVout)
100 nA to 100 mA range: V/I setting
accuracy 2.5ꢀ of range
1
2
The accuracy is applicable when offset cancellation has been performed.
The offset current specification is multiplied by one of the following factors
depending upon the ambient temperature and humidity (RH = Relative Humidity):
Humidity ꢀ
5 - 60
ꢁ2
RH
60 - 80
ꢁ2
Temperature
5 °C to 18 °C
18 °C to 28 °C
28 °C to 40 °C
ꢁ1
ꢁ2
ꢁ2
ꢁ5
3
100 V (Iout≤20 mA), 40 V (20 mA<Iout≤50 mA), 20 V (50 mA<Iout≤100 mA)
Vout is the output voltage in volts. Iout is the output current in amps.
For example, accuracy specifications are given as ꢀ of set/measured
value (0.04ꢀ) plus offset value (200 nA%1 nAꢁVout) for the 1 mA range.
The offset value consists of a fixed part determined by the set/measure-
ment range and a proportional part that is multiplied by Vout or Vout/100.
2
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