10 | Keysight | B1505A Power Device Analyzer/Curve Tracer - Data Sheet
HVSMU Module Specifications
Voltage range, resolution, and accuracy
Voltage
range
Force
resolution
Measure
resolution
Force accuracy 1
±(% + mV)
Measure accuracy 1
±(% + mV)
Maximum
current
±200 V
±500 V
±1500 V 1.5 mV
±3000 V 3 mV
200 µV
500 µV
200 µV
500 µV
1.5 mV
3 mV
±(0.03 + 40)
±(0.03 + 100)
±(0.03 + 300)
±(0.03 + 600)
±(0.03 + 40)
±(0.03 + 100)
±(0.03 + 300)
±(0.03 + 600)
8 mA
8 mA
8 mA
4 mA
1. ±(% of reading value + offset voltage in V)
Current range, resolution, and accuracy
Current
range
Force
resolution
Measure
resolution
Force accuracy 1
±(% + A + A)
Measure accuracy 1
±(% + A + A)
Maximum Minimum
voltage
set current2
1pA
±1 nA
±10 nA
±100 nA 100 fA
10 fA
100 fA
10 fA
100 fA
100 fA
±(0.1 + 6E-13 + Vo x 1E-15) ±(0.1 + 6E-13 + Vo x 1E-15) 3000 V
±(0.1 + 25E-13 + Vo x 1E-15) ±(0.1 + 25E-13 + Vo x 1E-15) 3000 V
±(0.05 + 25E-12 + Vo x 1E- ±(0.05 + 25E-12 + Vo x
13) 1E-13)
1pA
3000 V
100 pA
±1 µA
±10 µA
±100 µA 100 pA
±1 mA
1 pA
10 pA
1 pA
±(0.05 + 1E-10 + Vo x 1E-13) ±(0.05 + 1E-10 + Vo x 1E-13) 3000 V
±(0.04 + 2E-9 + Vo x 1E-11) ±(0.04 + 2E-9 + Vo x 1E-11) 3000 V
±(0.03 + 3E-9 + Vo x 1E-11) ±(0.03 + 3E-9 + Vo x 1E-11) 3000 V
±(0.03 + 6E-8 + Vo x 1E-10) ±(0.03 + 6E-8 + Vo x 1E-10) 3000 V
100 pA
10 nA
10 nA
100 nA
1 µA
10 pA
100 pA
1 nA
1 nA
10 nA
±10 mA
10 nA
±(0.03 + 2E-7 + Vo x 1E-9)
±(0.03 + 2E-7 + Vo x 1E-9) 1500 V
1. ±(%of reading value + fixed offset in A + proportional offset in A), Vo is the output voltage in V.)
2. Output current needs to be set more than current shown in the table.
Power consumption
HVSMU measurement and output range
Voltage source mode:
Current
compliance
Power
Current (mA)
I c ≤ 4 m
4 m < Ic ≤ 8 m
3000 x Ic + 12 (W) 1
1500 x Ic + 12 (W) 1
Where Ic is the current compliance setting.
8
4
Current source mode:
Voltage
Power
-3000
-1500
1
Voltage (V)
compliance
Vc ≤ 1500
1500 < Vc ≤ 3000
Where Vc is the voltage compliance setting and
Io is output current.
1500 x Io (W) + 12 1
3000 x Io (W) + 12 1
-1
-4
1500
3000
-8
1. The “+ 12” factor does not apply to the first
installed HVSMU; it only applies to the second
thru fifth installed HVSMUs.
HVSMU has 3 output range settings, which are “0 to +3 kV”, “-1500 V to +1500 V”,
and “0 to -3 kV”. If more than one HVSMU is installed in the B1505A, all of the HVS-
MUs must use the same output range setting.
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