V
S
Thin Film
Temperature
Compensation
and Gain
Gain Stage # 2
and Ground
Reference
Sensing
Element
V
OUT
Shift Circuitry
Stage # 1
Pins 1 and 5 through 8 are NO CONNECTS for small outline packages
Pins 4, 5, and 6 are NO CONNECTS for unibody packages
GND
Figure 1. Fully Integrated Pressure Sensor Schematic
TABLE 1. Maximum Ratings(1)
Rating
Symbol
Value
Unit
Maximum Pressure (P1 > P2)
Storage Temperature
P
400
kPa
MAX
STG
T
-40° to +125°C
-40° to +125°C
°C
°C
Operating Temperature
T
A
1. Exposure beyond the specified limits may cause permanent damage or degradation to the device.
TABLE 2. Operating Characteristics (VS = 5.0 VDC, TA = 25°C unless otherwise noted, P1 > P2. Decoupling circuit shown in
Figure 4 required to meet electrical specifications.)
Characteristic
Symbol
Min
Typ
Max
Unit
(1)
P
kPa
Pressure Range
OP
0
15
—
—
100
115
Gauge, Differential: MPX5100D/MPX5100G/MPXV5100G
Absolute: MPX5100A
(2)
V
4.75
—
5.0
7.0
5.25
10
V
DC
Supply Voltage
S
Supply Current
I
mAdc
O
(3)
V
V
0.088
0.20
0.313
V
V
V
OFF
DC
DC
DC
Minimum Pressure Offset
(0 to 85°C)
Differential and Absolute (0 to 85°C)
Differential and Absolute (0 to 85°C)
@ V = 5.0 V
S
(4)
4.587
—
4.700
4.500
—
4.813
—
Full Scale Output
FSO
@ V = 5.0 V
S
(5)
V
Full Scale Span
FSS
@ V = 5.0 V
S
(6)
—
—
2.5
%V
FSS
Accuracy
Sensitivity
V/P
—
—
45
—
—
mV/kPa
ms
(7)
t
1.0
Response Time
R
Output Source Current at Full Scale Output
I
—
—
—
0.1
20
—
—
—
mAdc
ms
O+
(8)
—
—
Warm-Up Time
(9)
0.5
%V
FSS
Offset Stability
1. 0.1 kPa (kiloPascal) equals 0.145 psi.
2. Device is ratiometric within this specified excitation range.
3. Offset (V
) is defined as the output voltage at the minimum rated pressure.
OFF
4. Full Scale Output (V
) is defined as the output voltage at the maximum or full rated pressure.
FSO
5. Full Scale Span (V
) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the
FSS
minimum rated pressure.
6. Accuracy (error budget) consists of the following:
• Linearity:
Output deviation from a straight line relationship with pressure over the specified pressure range.
• Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is cycled to
and from the minimum or maximum operating temperature points, with zero differential pressure applied.
• Pressure Hysteresis:
Output deviation at any pressure within the specified range, when this pressure is cycled to and from minimum
or maximum rated pressure at 25°C.
• TcSpan:
• TcOffset:
Output deviation over the temperature range of 0° to 85°C, relative to 25°C.
Output deviation with minimum pressure applied over the temperature range of 0° to 85°C, relative to 25°C.
• Variation from Nominal: The variation from nominal values, for Offset or Full Scale Span, as a percent of V
at 25°C.
FSS
MPX5100
Sensors
Freescale Semiconductor
2