MPX5100
Rev 10, 05/2005
Freescale Semiconductor
Technical Data
Integrated Silicon Pressure Sensor
On-Chip Signal Conditioned,
Temperature Compensated, and
Calibrated
MPX5100/MPXV5100
SERIES
INTEGRATED PRESSURE SENSOR
0 to 100 kpa (0 to 14.5 psi)
15 to 115 kPa
(2.2 to 16.7 psi)
0.2 to 4.7 V Output
The MPX5100 series piezoresistive transducer is a state-of-the-art monolithic
silicon pressure sensor designed for a wide range of applications, but particularly
those employing a microcontroller or microprocessor with A/D inputs. This
patented, single element transducer combines advanced micromachining
techniques, thin-film metallization, and bipolar processing to provide an accurate,
high level analog output signal that is proportional to the applied pressure.
SMALL OUTLINE PACKAGES
Features
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•
•
•
•
•
2.5% Maximum Error over 0° to 85°C
Ideally suited for Microprocessor or Microcontroller-Based Systems
Patented Silicon Shear Stress Strain Gauge
Available in Absolute, Differential and Gauge Configurations
Durable Epoxy Unibody Element
MPXV5100GC6U
CASE 482A-01
MPXV5100GC7U
CASE 482C-03
Easy-to-Use Chip Carrier Option
Typical Applications
MPXV5100DP
CASE 1351-01
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Patient Monitoring
Process Control
Pump/Motor Control
Pressure wSitching
PIN NUMBER(1)
1
2
N/C
5
N/C
N/C
V
6
S
ORDERING INFORMATION
3
4
GND
7
8
N/C
N/C
V
OUT
Device
Type
UNIBODY PACKAGE (MPX5100 SERIES)
Case MPX SeriesOrder
Options
Device Marking
No.
Number
1. Pins 1, 5, 6, 7, and 8 are internal device
connections. Do not connect to external
circuitry or ground. Pin1 is noted by the
notch in the lead.
Basic
Elements
Absolute
867
867
MPX5100A
MPX5100D
MPX5100A
MPX5100D
MPX5100DP
MPX5100AP
MPX5100GP
MPX5100D
Differential
PIN NUMBER(1)
Ported
Elements
Differential Dual Ports
Absolute, Single Port
Gauge, Single Port
Gauge, Axial PC Mount
Gauge, Axial Port, SMT
Gauge, Axial Port, DIP
Gauge, Dual Port, SMT
867C MPX5100DP
867B MPX5100AP
867B MPX5100GP
867F MPX5100GSX
1
V
4
N/C
OUT
2
3
GND
5
6
N/C
N/C
V
S
1. Pins 4, 5, and 6 are internal device
482A MPXV5100GC6U MPXV5100G
482C MPX5V100GC7U MPXV5100G
connections. Do not connect to external
circuitry or ground. Pin 1 is noted by the
notch in the lead.
1351 MPXV5100DP
MPXV5100
UNIBODY PACKAGES
MPX5100A/D
CASE 867-08
MPX5100GSX
CASE 867F-03
MPX5100DP
CASE 867C-05
MPX5100AP/GP
CASE 867B-04
© Freescale Semiconductor, Inc., 2005. All rights reserved.