Accessory Specifications
PGU port signal transfer characteristics
Specification Condition
The “supplemental information”
16442A Test Fixture
Overshoot: <5ꢀ of pulse amplitude (@20
ns leading and trailing time,
Channel Information
and “typical” entries in the following speci-
fications are not warranted, but provide
useful information about the functions and
50 Ω pulse generator source impedance, 50 SMU:
pF and 1 MΩ in parallel load).
General Specifications
Dimensions:
6 channels (1 triaxial connector per
channel)
performance of the instruments (23 °C
°, 50ꢀ RH).
5
3 channels (1 Kelvin triaxial connector
per channel)
50 mm H ꢁ 250 mm W ꢁ 275 mm D
Approximate weight: 1.1 kg
VSU:
16440A SMU/Pulse Generator
Selector
2 channels (1 BNC connector per
channel)
16441A R-BOX
VMU:
The 16441A R-BOX adds a selectable
series resistor to the SMU output. You can
select the resistor from the setup page,
and the voltage drop due to the series
resistor is automatically compensated for
in the measurement result.
The 16440A switches either an SMU or
PGU to the associated output port. You
can expand to 4 channels by adding an
additional 16440A. The channel 1 PGU port
provides a “PGU OPEN” function, which
can disconnect the PGU by opening a
semiconductor relay. The 16440A cannot
work without two pulse generator units of
the 41501A/B (SMU and Pulse Generator
Expander).
2 channels (1 BNC connector per
channel)
PGU:
2 channels (1 BNC connector per
channel)
GNDU:
Measurement limitations with the 4155C
and 4156C and R-BOX:
1 channel (1 triaxial connector)
INTLK: 6-pin connector
If you measure device characteristics
including negative resistance over 1
MΩ with the 4155C/4156C and R-BOX,
there is a possibility that they cannot
be measured. There is a possibility that
the 4155C and 4156C cannot perform
measurements because of DUT oscil-
lations even with the R-BOX. Whether
oscillation occurs or not depends upon
the DUT and measurement conditions.
Number of SMU channels that can add a
resistor: 2
Supplemental Information
(at 23°C 5°C, 50% RH)
SMU channel:
Channel configurations:
Two channels (CH1, CH2)
Leakage current: 10 pA max @200 V
(Force or Sense , Common)
Stray capacitance: 15 pF max
(Force or Sense , Common)
Stray capacitance: 3 pF typical
(Force or Sense , Other SMU)
Residual resistance: 60 mΩ typical
(Force, Sense)
CH1: INPUT ports: 2 (SMU and PGU, PGU
port has additional series semiconductor
relay)
OUTPUT port: 1
CH2: INPUT ports: 2 (SMU and PGU)
OUTPUT port: 1
Voltage and Current Range
Guard capacitance: 70 pF max
(Force or Sense , Guard)
VSU channel residual resistance:
60 mΩ typical
VMU channel residual resistance:
60 mΩ typical
PGU channel characteristic impedance:
50 mΩ typical
Input port Max. V
Max. I
Resistor values:
SMU
PGU
200 V
40 V
1.0 A
1 MΩ, 100 kΩ, 10 kΩ, 0 Ω (each channel)
Resistance accuracy:
0.2 A (AC Peak)
0.3ꢀ (at 23 °C 5 °C, between input/
output terminal)
Supplemental Information
(at 23 °C 5 °C, 50%RH)
SMU port leakage current:
< 100 fA @100 V
Maximum voltage: 200 V
Maximum current: 1 A (0 Ω selected)
Kelvin connection: Kelvin connection is
effective only when 0 Ω is selected.
Supplemental Information (at 23 °C
5 °C, 50%RH)
GNDU channel residual resistance:
40 mΩ typical (Force, Sense)
General Specifications
Temperature range:
SMU port residual resistance (typical):
0.2 Ω
SMU port stray capacitance (typical
@1 MHz):
Leakage current: <100 fA @ 100 V
General Specifications
Operating: %5 °C to %40 °C
Storage: -40 °C to %70 °C
Humidity range:
Force , Common: 0.3 pF
Force , Guard: 15 pF
Dimensions:
Guard , Common: 130 pF
PGU port residual resistance: 3.4 Ω
PGU port OFF capacitance (typical): 5 pF
PGU port OPEN capacitance (typical):
700 pF (@ 1 MHz, Vin - Vout = 0V)
72 mm H ꢁ 250 mm W ꢁ 270 mm D
Approximate weight: 1.6 kg
Operating: 5ꢀ to 80ꢀ RH
(no condensation)
Storage: 5ꢀ to +0ꢀ RH at 65 °C
(no condensation)
Dimensions:
140 mm H ꢁ 260 mm W ꢁ 260 mm D
Weight (approx.): 2.5 kg
10
AGILENT [ AGILENT TECHNOLOGIES, LTD. ]
