MIL-PRF-38535K
APPENDIX H
H.3.4 Qualification.
H.3.4.1 Technology qualification. The process for qualification is outlined below and is further described in detail in the
subsequent sections.
a. Plan approval.
(1) Screening flow.
(2) Process performance characterization plans and data.
(3) Process qualification test plans and data.
(4) For class level B products, life test on a minimum of 1 wafer lot for 1000 hrs minimum at 125°C ambient, or
equivalent.
(5) For class level S products, long term life test shall meet the requirements of paragraph B.3.4, appendix B, or
shall meet long term life test on a minimum of 1 wafer lot for 4,000 hours minimum at 125°C ambient, or
equivalent.
b. Report approval.
For initial technology qualification, a sufficient number of SEC devices is required, from wafers passing the wafer screen
requirements and randomly chosen and evenly distributed from three wafer lots for life testing and total ionizing dose (TID)
requirements (RHA products only). The testing shall be performed in accordance with MIL-PRF-38535 Groups A, B, C, D, and
E (if applicable) or to the agreed to alternatives and test optimizations defined in the QM plan. The number of SEC device
failures shall serve as a qualification benchmark for the technology. Failure analysis (FA) should be done on failed SEC's to
determine each failure category and action taken to correct any problems found. The SEC reliability data, including FA results,
should be available for review by the QA. For RHA environments, irradiate SEC to demonstrate radiation hardness assurance
capabilities limit (RHACL).
For new class level S product, if the technology is mature at other levels, the manufacturer may provide a
supplemental/alternative data submittal to the QA for the reliability demonstration above. The alternative data submittal may
include, but is not limited to the following:
a. Historic product shipment summary - total quantity shipped of similar product/family on same process.
b. Field returns summary. (NOTE: Proprietary information such as program names and individual customer names shall
not be revealed.)
c. Reliability summary data - from the reliability monitor program & Failure rate calculation.
d. Historic qualification data - from similar product(s) from the same process family.
e. Examples of process monitors and data showing performance & trends from recent lots.
f. Examples of wafer lot acceptance reports.
NOTES: For complex devices initial technology qualification, a sufficient number of SEC or actual devices are required, and
selected devices must pass wafer screen test requirements. The SEC or actual devices shall be chosen randomly and evenly
distributed from multiple wafers or multiple wafer lots or single wafer lot (with the approval of QA) for life testing, and for RHA
devices, total ionizing dose (TID) test and samples size shall meet the requirements of table C-I group E test herein and
TM 1019 of MIL-STD-883.
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ACTEL [ Actel Corporation ]
