13 | Keysight | B1505A Power Device Analyzer/Curve Tracer - Data Sheet
SMU pulse setting accuracy
(fixed measurement range):
For MCSMU:
Overshoot:
Sense: 10 Ω
Force : 1 Ω
(Filter ON for all SMUs)
For HPSMU and MPSMU:
Width: ±0.5% ± 50 µs
Period: ±0.5% ± 100 µs
For HPSMU and MPSMU
Voltage source: 0.03% of V range
Current source: 1% of I range
(with Low Force)
Maximum allowable inductance:
For HCSMU and MCSMU:
Width: ±0.1% ± 2 µs
Period: ±0.1% ± 100 µs
For HCSMU and MCSMU
For HCSMU and MCSMU:
Force 3 µH
(filter ON)
Voltage/Current source:
10% of range
(with Low Force (shield))
For HVSMU:
Width: ±0.1% ± 2 µs
Period: ±0.5% ± 100 µs
For HVSMU
Maximum load capacitance:
Voltage source: 1 V (resistive load)
Current source: 1% of I range
Minimum pulse
measurement time:
For HPSMU and MPSMU:
1 pA to 10 nA ranges: 1000 pF
100 nA to 10 mA ranges: 10 nF
100 mA and 1 A ranges: 100 µF
Range switching
transient noise:
16 µs (HPSMU and MPSMU)
2 µs (HCSMU and MCSMU)
6 µs (HVSMU)
For HCSMU:
For HPSMU and MPSMU
10 µA to 10 mA ranges: 12 nF
100 mA to 20 A ranges: 100 µF
Voltage source
output resistance:
(filter ON):
Voltage ranging: 250 mV
Current ranging: 70 mV
For MCSMU:
(Force line, non-Kelvin connection)
0.2 Ω (HPSMU)
0.3 Ω (MPSMU)
10 µA to 10 mA range : 12 nF
100 mA to 1 A range : 100 µF
For HCSMU and MCSMU:
10 µA to 1 A ranges:
Voltage ranging: 250 mV
Current ranging: 70 mV
20 A ranges:
For HVSMU:
3 Ω (HVSMU, at 10 mA range)
1 nA to 1 µA ranges: 1000 pF
10 µA to 10 mA ranges: 10 nF
Voltage measurement
input resistance:
Voltage ranging: 5 V max
≥ 1013 Ω (HPSMU, MPSMU)
≥ 109 Ω (HCSMU, MCSMU, ≤ 1 A),
80 kΩ (HCSMU, 20 A)
Maximum guard capacitance:
For HVSMU:
900 pF (HPSMU and MPSMU)
1500 pF (HVSMU)
Voltage ranging: 300 mV
Current ranging: 300 mV
≥ 1012 Ω (HVSMU)
Current source
output resistance:
Maximum shield capacitance:
Maximum guard
offset voltage:
5000 pF (HPSMU, MPSMU and HVSMU)
≥ 1013 Ω (HPSMU, MPSMU)
≥ 109 Ω (HCSMU, MCSMU, ≤ 1 A),
80 kΩ (HCSMU, 20 A)
±1 mV (HPSMU)
±3 mV (MPSMU)
±5 mV (HVSMU)
Noise characteristics:
≥ 1012 Ω (HVSMU, at 10 nA range)
For HPSMU, MPSMU and HVS-
MU (Filter ON for HPSMU and
Maximum allowable
cable resistance:
Maximum slew rate:
MPSMU.)
0.2 V/µs (HPSMU and MPSMU)
1 V/µs (HCSMU and MCSMU)
0.4 V/µs (HVSMU)
Voltage source:
0.01% of V range (rms.)
Current source:
(Kelvin connection)
For HPSMU and MPSMU:
Sense: 10 Ω
Force: 10 Ω (≤ 100 mA),
1.5 Ω (>100 mA)
0.1% of I range (rms.)
Output settling time
For HCSMU
For HVSMU:
Voltage/Current source:
100 mV (0 to peak) max
Output settling time: 500 µs
To reach 0.01% of settling value.
Conditions:
For HCSMU:
Sense: 10 Ω
Force: 0.6 Ω
For MCSMU
Voltage / Current source:
200 mV (0 to peak) max
100 V step, 8 mA compliance,
1000 pF load capacitance
(with Low Force)
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