PRESSURE SENSOR DIE (0-300 mmHg)
MS763
• 0 to 300 mmHg range (0.4 bar or 5.8 PSI)
• Absolute or differential pressure sensors
• Medical applications
• RoHS-compatible & Pb-free1
DESCRIPTION
The MS763 is a biomedical sensor. It has been designed as an implantable sensor where all the connections are
on one side. The bonding pads are large in order to glue or solder wires on.
The sensor element of the MS763 consists of a silicon micro-machined membrane. Implanted resistors sense
the deformation of the membrane by using of the piezo-resistive effect. The MS763 is available as a differential
sensor (MS763-S) without base Pyrex or as an absolute sensor with a 0.2 mm thick Pyrex (MS763-A).
FEATURES
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Uncompensated pressure sensor die
Small size, made for implantable sensor
Connections on one side
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Temperature Range -40°…+125°C
Linearity 0.15% (typical)
Die Size 1.3 x 2.2 mm2
Sensitivity: 0.075 mV / mmHg@ 5V
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High reliability
APPLICATION
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Medical applications
Blood pressure measurement.
Designed for implantable devices
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Differential pressure sensor systems.
ELECTRICAL CONNECTIONS
Vs+
Positive output for pressure applied topside
Vs+ : Supply voltage of Wheatstone bridge
Out- : Negative output
Out+
Out+ : Positive output
Out-
GND : Ground
GND
1 The European RoHS directive 2002/95/EC (Restriction of the use of certain Hazardous Substances in electrical and electronic equipment)
bans the use of lead, mercury, cadmium, hexavalent chromium and polybrominated biphenyls (PBB) or polybrominated diphenyl ethers
(PBDE).
DA763_002.doc
00007631360
ECN 1147
October 9, 2008
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INTERSEMA [ INTERSEMA SENSORIC SA ]
