6517B Electrometer/High Resistance Meter
Ohms (Normal Method)
Accuracy (1 Year) 1
(10–100% Range) 18°–28°C
(% + offset)
Temperature Coefficient
(10–100% Range) 0°–18°C &
28°–50°C (% + offset)
6½-Digit
Resolution
Range
2 MΩ
Auto V Source
40 V
Amps Range
200 µA
20 µA
1 Ω
0.125 + 10 Ω
0.125 + 100 Ω
0.15 + 1 kΩ
0.01 + 10 Ω
0.01 + 100 Ω
0.015 + 1 kΩ
0.035 + 10 kΩ
0.035 + 100 kΩ
0.110 + 1 MΩ
0.110 + 10 MΩ
0.105 + 100 MΩ
0.125 + 1 GΩ
20 MΩ
200 MΩ
2 GΩ
10 Ω
40 V
100 Ω
1 kΩ
40 V
2 µA
0.225 + 10 kΩ
0.225 + 100 kΩ
0.35 + 1 MΩ
0.35 + 10 MΩ
1.025 + 100 MΩ
1.15 + 1 GΩ
40 V
200 nA
20 nA
20 GΩ
200 GΩ
2 TΩ
10 kΩ
100 kΩ
1 MΩ
40 V
40 V
2 nA
400 V
400 V
400 V
2 nA
20 TΩ
200 TΩ
10 MΩ
100 MΩ
200 pA
20 pA
Notes
1. Specifications are for auto V-source ohms, when properly zeroed, 6½-digit, 1 PLC, median filter on, digital filter = 10 readings. If user selectable voltage is required, use manual mode.
Manual mode displays resistance (up to 1018 Ω) calculated from measured current. Accuracy is equal to accuracy of V-source plus accuracy of selected Amps range.
Preamp Settling Time
Add voltage source settling time to preamp settling time in Amps specification. Ranges over 20 GΩ require
additional settling based on the characteristics of the load.
Ohms (Alternating Polarity Method)
The alternating polarity sequence compensates for the background (offset) currents of the material or device under test. Maximum tolerable
offset up to full scale of the current range used.
Using Keithley 8009 fixture
Repeatability
Accuracy
∆IBG × R/VALT + 0.1% (1σ) (instrument temperature constant 1°C).
(VSRCErr + IMEASErr × R)/VALT
where: ∆IBG is a measured, typical background current noise from the sample and fixture.
VALT is the alternating polarity voltage used.
VSRCErr is the accuracy (in volts) of the voltage source using VALT as the setting.
IMEASErr is the accuracy (in amps) of the ammeter using VALT/R as the reading.
Voltage Source
Accuracy (1 Year)
18°–28°C
(% setting + offset)
Temperature Coefficient
0°–18°C & 28°–50°C
(% setting+offset)/°C
Range
100 V
5½-Digit Resolution
5 mV
0.15 + 10 mV
0.005 + 1 mV
0.005 + 10 mV
1000 V
50 mV
0.15 + 100 mV
Maximum Output Current
Settling Time
100 V Range: 10 mA, hardware short circuit protection at <14 mA.
1000 V Range: 1 mA, hardware short circuit protection at <1.4 mA.
100 V Range: <8 ms to rated accuracy.
1000 V Range: <50 ms to rated accuracy.
Noise (typical)
100V Range: <2.6 mV rms.
1000V Range: <2.9 mV rms.
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TEKTRONIX [ TEKTRONIX, INC. ]
