AWM90000 Series
Mass flow sensor for gases
GAS CORRECTION FACTORS9
Gas type
Correction factor (approx.)
Helium (He)
Hydrogen (H2)
Argon (Ar)
0.510
0.710,11
0.95
1.0
Nitrogen (N2)
Oxygen (O2)
1.0
Air
1.0
Nitric oxide (NO)
Carbon monoxide (CO)
Methane (CH4)
Ammonia (NH3)
Nitrous oxide (N2O)
Nitrogen dioxide (NO2)
Carbon dioxide (CO2)
1.0
1.0
1.1
1.1
1.35
1.35
1.35
Notes:
9
Gas correction factors are referenced to nitrogen (N2) as calibration gas type. Approximate gas correction factors are provided
as guidelines only. Individual gas types may perform differently at temperature extremes and varying flow rates.
10 When sensing Hydrogen (H2) or Helium (He) it may be necessary to power the mass flow sensor using increased supply voltage:
Hydrogen typ. 12 V, Helium typ. 15 V
11 Hydrogen (H2) flow measurement requires the use of a special sensor. These devices provide normal operation when sensing
hydrogen flow and are designated with an "H" at the end of the order number.
ORDERING INFORMATION
Flow range
Dry gas
±200 sccm
AWM92100V
Pressure range
Dry gas
±2 "H2O (±5 mbar)
AWM92200V
Sensortechnics reserves the right to make changes to any products herein. Sensortechnics does not assume any liability arising out of the
application or use of any product or circuit described herein, neither does it convey any license under its patent rights nor the rights of others.
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