AWM90000 Series
Mass flow sensor for gases
FLOW SENSOR CHARACTERISTICS3
VS = 10 ±0.01 V, TA = 25°C
Flow range
(full scale)
Pressure
range
Output voltage
@ trim point
Part no.
Max. flow change4
AWM92100V
AWM92200V
±200 sccm
5.0 l/sec
5.0 l/sec
77 mV @ 200 sccm
38 mV @ 2 "H2O
±2 "H2O
PERFORMANCE CHARACTERISTICS
VS = 10 ±0.01 V, TA = 25°C
Characteristics
Zero offset
Min.
Typ.
Max.
15
Unit
mV
-15
0
Repeatability and hysteresis (combined)
AWM92100V
±0.35
%FSO
AWM92200V
±0.1
±0.30
±2.07
-3.08
255
% reading
Ratiometricity error2
Temperature effects5
-25 to 85 °C6
-25 to 25 °C
mV
%FSO
% reading
%FSO
% reading
kOhm
mA
Offset
Span
AWM92100V
AWM92200V
AWM92100V
AWM92200V
±1.08
-305
25 to 85 °C
Sensor resistance (pin 1 - pin 2, pin 1 - pin 8)
Sensor current
1.5
1.75
2.2
0.6
3.0
25
Response time
1.0
ms
Common mode pressure
psi
Notes:
2 Output voltage is ratiometric to supply voltage
3 A 5 micron filter is recommended for all devices.
4
Maximum allowable rate of flow change to prevent damage.
Temperature shifts in differential pressure devices are mostly due to the density change of the gas over temperature.
5
6 Shift is relative to 25 °C.
7 Assumes low TCR bridge resistance used (pins 2 and 8).
8 Requires recommended Rc value of 1K Ohm is used (pins 3 to 7) and typ. heater control circuit. Maximum current Rh.
2/6
December 2007 / 592
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