AWM2000 Series
Mass flow sensor for gases
FLOW SENSOR CHARACTERISTICS3
VS = 10 ±0.01 V, TA = 25°C
Flow range
(full scale)
Pressure
range
Output voltage
@ trim point
Part no.
Max. flow change4
AWM2100V
AWM2150V
AWM2200V
AWM2300V
±200 sccm
±30 sccm
5.0 l/sec
5.0 l/sec
5.0 l/sec
5.0 l/sec
30 mV @ 100 sccm
11.8 mV @ 25 sccm
20 mV @ 2 "H2O
±4 "H2O
±1000 sccm
50 mV @ 650 sccm
PERFORMANCE CHARACTERISTICS
VS = 10 ±0.01 V, TA = 25°C
Characteristics
Zero offset
Min.
Typ.
Max.
1.0
Unit
-1.0
0
mV
Repeatability and hysteresis
(combined)
AWM2300V
±1.0
±0.35
% reading
mV
all others
Temperature effects5
-25 to 85 °C6
-25 to 25 °C
±0.20
Offset
Span
AWM2100V
AWM2150V
AWM2200V
AWM2300V
AWM2100V
AWM2150V
AWM2200V
AWM2300V
2.5
5.0
22.05
5.0
% reading
25 to 85 °C
-2.5
-5.0
-22.05
-5.0
Sensor resistance
(Pin 2 - Pin 1, Pin 6 - Pin 1)
5
kOhm
mA
Sensor current
(Pin 2 - Pin 1, Pin 6 - Pin 1)
0.6
Response time
1.0
3.0
25
ms
psi
Common mode pressure
Notes:
3 A 5 micron filter is recommended for all devices.
4
Maximum allowable rate of flow change to prevent damage.
Temperature shifts in differential pressure devices are mostly due to the density change of the gas over temperature.
5
6 Shift is relative to 25 °C.
2/6
June 2005 / 581
www.sensortechnics.com
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