AWM2000 Series
Mass flow sensor for gases
FEATURES
· Ranges 0...±30 to 0...±1000 sccm1
or 0...±4 "H2O (0...±10 mbar)
· Bidirectional sensing
· Actual mass flow sensing
· Low differential pressure sensing
SERVICE
To be used with dry gases only
The AWM series is NOT designed for liquid
flow and will be damaged by liquid flow through
the sensor
SPECIFICATIONS
ELECTRICAL CONNECTION
Maximum ratings
Supply voltage2
8 to 15 V
typ. 10 ±0.01 V
Power consumption
max. 50 mW
typ. 30 mW
P 1
P 2
Temperature limits
Operating
-25 to 85°C
-40 to 90°C
Storage
Mechanical shock
100 g (5 drops, 6 axes)
1 2 3 4 5 6
Note:
1
sccm denotes standard cubic centimeters per minute
Output voltage is ratiometric to supply voltage
2
June 2005 / 581
1/6
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