PEDL9041A-02
OKI Semiconductor
ML9041A-xxA/xxB
ML9041A-xxBCVWA ALIGNMENT MARK SPECIFICATION
Alignment Mark Coordinates
Y
B
A
..................................................................................................
(0,0)
X
C
µ
µ
Alignment Mark
X ( m)
Y ( m)
A
B
C
–5100
5100
5100
960
960
–840
Alignment Mark Layer
Metal layers
Alignment Mark Specification
µ
Symbol
Parameter
Mark
—
Size ( m)
a
b
Alignment Mark Width
Alignment Mark Size
25.2
100.2
26.8
17.1
87.3
57.3
57.3
164.7
69.1
69.1
173.7
—
Mark A
Mark B
Mark C
Mark A
Mark B
Mark C
Mark A
Mark B
Mark C
c
d
e
Distance between Mark and Internal Pattern (MIN)
Distance between Mark and Adjacent Pad Metal Layer (MIN)
Distance between Mark and Adjacent Pad Bump (MIN)
Metal
Bump
b
d
b
a
c
e
Metal
Bump
a
Internal Pattern
61/64
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