Application Example
Positioning of stepper, Clamping actuator of wire bonding, Valve actuation of mass flow controller, Actuator of
shaker, Actuator of damping system, Positioning of light source.
Semiconductor manufacturing system
Precision machinery, Mechatronics
Home appliance, Audio equipment
Imaging equipment
Sewing machine, Robot, Vibration of parts feeder, Positioning of equipment, Pressure sensor
Actuator of pump, Speaker
Actuator of resolution improvement, Actuator of autofocusing, Actuator of damping
Pressure sensor, Positing of memory device（data storage or others）
Positioning of stage, Actuator of autofocusing, Actuator of shaker and damping system
Polarization control, Wavelength control
Computer, OA equipment
Optical equipment
Communications
Medical equipment
Micropump, Ultrasonic transducer
Measuring instrument
Automobile
Pressure sensor, Acceleration sensor, Fine positioning
Vibration control
18 Multilayer Piezoelectric Actuators Vol.06
●All specifications in this catalog and production status of products are subject to change without notice. Prior to the purchase, please contact NEC TOKIN for updated product data.
●Please request for a specification sheet for detailed product data prior to the purchase.
●Before using the product in this catalog, please read "Precautions" and other safety precautions listed in the printed version catalog.
2011.06.22 9307MPAVOL06E1106H2
NEC [ NEC ]
