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MLX90807 参数 Datasheet PDF下载

MLX90807图片预览
型号: MLX90807
PDF下载: 下载PDF文件 查看货源
内容描述: 相集成压力传感器 [Relative Integrated Pressure Sensor]
分类和应用: 传感器压力传感器
文件页数/大小: 8 页 / 165 K
品牌: MELEXIS [ Melexis Microelectronic Systems ]
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MLX90807  
Relative Integrated Pressure Sensor  
5 Diagnostic features  
DC Operating Parameters TA = -40oC to 140oC, VDD = 5 V (unless otherwise specified)  
Parameter  
Outputꢀwhenꢀsensorꢀisꢀbrokenꢀꢀ  
Symbol  
Test Conditions  
Sensorꢀbrokenꢀ  
Pullꢀupꢀ>ꢀ4k7ꢀ  
Pullꢀdownꢀ  
Pullꢀdownꢀ>ꢀ10kꢂꢀ  
Pullꢀupꢀ  
Min Typ Max Units  
2ꢀ  
4ꢀ  
0ꢀ  
%ꢀVddꢀ  
%ꢀVddꢀ  
%ꢀVddꢀ  
%ꢀVddꢀ  
%ꢀVddꢀ  
OutputꢀwhenꢀꢀVddꢀꢀisꢀbrokenꢀ  
OutputꢀwhenꢀꢀVddꢀꢀisꢀbrokenꢀ  
OutputꢀwhenꢀꢀVssꢀisꢀbrokenꢀ  
OutputꢀwhenꢀꢀVssꢀisꢀbrokenꢀ  
Table 3: Diagnostic features  
96ꢀ  
100ꢀ  
6 Detailed General Description  
This chip integrates a pressure sensor and the associated signal conditioning on the same die. The supply  
voltage VDD directly supplies the pressure sensor.  
The pressure sensing element consists of a square diaphragm realized in the silicon chip by backside  
etching. Due to its small thickness this diaphragm reacts to a pressure difference at both of its side by  
cambering. The internal strain increases, in particular at the border of the diaphragm. Here, the piezo-  
resistive elements have been implanted into the silicon diaphragm, which act as transducer.  
The piezo-resistive elements react to pressure induced changes of strain by changes in their resistance. Four  
resistors are placed at all four borders of the square diaphragm. They are arranged in a Wheatstone-bridge.  
A chopped instrumentation stage amplifies the differential output signal of the sensor. The gain of this  
amplifier can be adjusted with 3 bits. After the input stage, there is a 3 bit programmable coarse offset which  
is followed by a differential to single-ended conversion. The reference voltage for this stage is generated by a  
10 bit DAC and varies linearly with temperature in order to perform the offset and offset drift compensation. A  
digital hardware multiplier calculates this compensation. The temperature signal, serving as input for this  
multiplier, is generated from the ADC of the output signal of the internal temperature sensor.  
The chopped signal is demodulated with a switched capacitor stage. The buffered output serves as reference  
for a 10 bit DAC to perform the span and span drift compensation. The DAC is controlled by the digital part.  
Finally the signal is given out by a class AB rail-to-rail amplifier capable of sourcing and sinking large  
currents.  
A 3-point temperature and 2-point pressure calibration is required (room temperature, a low temperature and  
a high temperature), to achieve an error less than 1% over the complete pressure and temperature range  
(the output error is referred to the output span).  
PTC (Programming Through Connector) protocol is used to perform calibration.  
The programming of the sensor chip is carried out via the analog connections (i.e. supply, ground, signal out).  
No additional pins are necessary for calibration.  
The output circuit is protected against short circuit to GND, Vbat (16V) and Vdd.  
3901090807  
Rev 003  
Page 4 of 8  
Data Sheet  
Feb 08  
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