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060220-A3
MTX2-02G
Dual Axis Accelerometer – Low g
ELECTRICAL AND DIE LAYOUT
XR
YM
YL
YR
XM
XL
Pad
Description
XL
X axis left capacitance
(fixed electrode)
X axis right
XR
capacitance(fixed
electrode)
YL
Y axis left
capacitance(fixed
electrode)
YR
Y axis right
capacitance(fixed
electrode)
M
Common electrode for
applying voltage bias
(moving electrode)
XR
YR
YM
XL
YL
XM
Preliminary