1907 Westlands Centre, 20 Westlands Road, Quarry Bay, Hong Kong
Tel : (+852) 2565 6979
Email : sales@jlworld.com
Website : www.jlworld.com
Fax : (+852) 2565 0319
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060220-A3
MTX2-02G
Dual Axis Accelerometer – Low g
DIMENSIONS
Plan View (w/o silicon cap)
Plan View
AA
FF
EE
CC
YR
XR
YM
DD
YL
BB
XL
XM
Y
KK
LL
MM
OO
PP
QQ
NN
Dim
Typical
3688
630
1790
550
AA
BB
CC
DD
EE
Side view
JJ
II
510
HH
FF
370
KK
LL
200
358
GG
MM
NN
OO
PP
358
358
358
358
Dim
GG
Typical
4170
500
HH (glass substrate)
II (silicon device wafer)
JJ (silicon cap wafer)
QQ
200
30
200
All units in um.
Preliminary