For GSWU
Measurement accuracy
Atto-sense and switch unit
(ASU) specifications
Input:
Impedance measurement error is given by
adding the following additional error Ee to
the MFCMU measurement error.
Control port: for SCUU
Mini pin plug ports: Guard1, Guard2
AUX path specification
Maꢀimum voltage
Ee = (A ꢁ ZS/|ZX| ꢁ YO|ZX|) ꢀ 100 (%)
ZX: Impedance measurement value (Ω)
A: 0.05 % (direct docking) or
0.1 % (indirect docking)
Output:
100 V (AUX input to AUX common)
100 V (AUX input to circuit common)
42 V (AUX common to circuit common)
LED: Connection status indicator
SCUU supplemental information
SMU path:
Maꢀimum current
0.5 A (AUX input to force output)
ZS: 500 ꢁ 500 ꢀ f (mΩ)
Offset current: < 20 fA
YO: 1 ꢁ 1000 ꢀ f/100 (nS)
Offset voltage: < 100 µV at 300 sec
ASU supplemental information
Band width (at -3 dB)
(direct docking, ꢀ2 for indirect docking)
Note: f is frequency in MHz.
Closed channel residual resistance:
< 200 mΩ
Channel isolation resistance: > 1015
30 MHz (AUX port)
When the measurement terminals are
eꢀtended by using the measurement cable,
the measurement accuracy is applied to
the data measured after performing the
open/short/load correction at the DUT
side cable end.
Ω
CMU path:
Test signal
SMU CMU unify unit (SCUU)
and guard switch unit (GSWU)
specifications
Signal output level additional errors
(CMU bias, open load):
2 % (direct docking)
The SCUU multipleꢀes the outputs from
two SMUs (MPSMUs and/or HRSMUs)
and the CMU. The SCUU outputs are two
sets of Kelvin triaꢀial ports (Force and
Sense). The SCUU also allows the SMUs
to act as DC bias sources in conjunction
with the CMU. Special cables are available
to connect the SMUs and CMU with
the SCUU, and an auto-detect feature
automatically compensates for the cable
length going to the SCUU.
Note: The error is specified under the
following conditions:
7 % (indirect docking)
Signal output level additional errors
(SMU bias, open load):
Temperature: 23 °C 5 °C
Integration time: 1 PLC or 16 PLC
5 % (direct docking, ≥ 10 kHz)
10 % (indirect docking, ≥ 10 kHz)
Output impedance: 50 Ω, typical
Signal level monitor additional errors
(open load):
2 % (CMU bias), direct docking
5 % (SMU bias), direct docking
7 % (CMU bias), indirect docking
10 % (SMU bias), indirect docking
The GSWU contains a relay that auto-
matically opens for IV measurements and
closes for CV measurements, forming a
guard return path to improve CV measure-
ment accuracy.
DC bias function
DC voltage bias (CMU bias):
Range: 0 to 25 V
Supported SMU
Resolution: 1 mV
Additional errors (for CMU bias):
100 µV (open load)
DC voltage bias (SMU bias):
Range: 0 to 100 V
Resolution: 5 mV
Additional errors (for SMU voltage
output accuracy): 100 µV (open load)
DC bias monitor additional errors (open load):
20 mV, direct docking
30 mV, indirect docking
Output impedance:
50 Ω, typical
DC output resistance: 50 Ω (CMU bias),
130 Ω (SMU bias)
MPSMU and HRSMU
For SCUU
Inputs:
Triaꢀial ports: Force1, Sense1, Force2,
and Sense2
BNC ports: for MFCMU
Control port: for MFCMU
Outputs:
Triaꢀial ports: Force1/CMUH, Sense1,
Force2/CMUL, and Sense2
Control port: for GSWU
LEDs: SMU/CMU output status indicator
Docking mode:
Direct and indirect mode
10
HP [ HEWLETT-PACKARD ]
