Pressure sensors
C32 series
Absolute pressure sensor die for wet media
Preliminary data
Applications
ꢀ Medical devices
ꢀ Automotive
ꢀ Automation
Features
ꢀ Piezoresistive MEMS technology
ꢀ Small dimensions: 1.65 × 1.65 mm
ꢀ Square diaphragm
ꢀ Reference pressure chamber on topside
ꢀ Measured media (back side):
Non-aggressive gases and fluids.
Unsuitable for substances which react with
glass or silicon.
ꢀ Whetstone bridge with mV output,
ratiometric to supply voltage
ꢀ Rated pressure ranges 1.6 up to 40 bar
ꢀ Outstanding long-term stability
Delivery mode
ꢀ Tray / foil
Dimensional drawings
150
A B
+100
400-0
1650 100
300
5
800 20
713
713
Note1
B
125
X10
X11
X5
X1
X10
A
allowable edge disruptions
80 µm max.
allowable edge disruptions
50 µm max.
X10
X4
X10
X11
X2
electrical diagram:
760
260
glass
BOROFLOATTM
X5
1425
Si 100
glass
BOROFLOATTM
p
all dimensions in µm
R2
R4
R1
R3
Note1: geometry of diaphragm depend on
specification
X1 : Vout+
X2 : VDD–
X4 : Vout–
X5 : VDD+
X4
X1
X10 : Substrate
X11 : Shield
X2
AS SEN PD
2009-08-03
Please read Cautions and warnings and
Page 2 of 8
Important notes at the end of this document.
EPCOS [ EPCOS ]
