System Specifications
System
Grating Period
Signal Period
20µm
20µm
System Resolution 5µm - 0.078µm in integer interpolation steps (factory set or user
programmed using MicroE SmartPrecision Software)
Linear accuracy*
Interpolation
accuracy:
Better than 0.12µm over any 20µm movement
Long-travel
accuracy:
1µm accuracy available - consult MicroE
Better than 3µm for scales up to 130mm
Better than 5µm for scales 155mm to 1m
Better than 5µm per meter for scales 1m or more
*Maximum peak to peak error over the specified movement when compared to a NIST-traceable laser interferometer standard,
used at room temperature and with MicroE interpolation electronics.
Rotary Accuracy* Scale O.D.
12.00mm
Microradians
Arc-Seconds
100
63
38
1ꢂ
10
21
1ꢂ.05mm
13
31.75mm
57.15mm
107.ꢂ5mm
7.8
3.ꢂ
2.1
*Based on ideal scale mounting concentricity
Sensor Size
W:
L:
12.70mm
20.57mm
8.38mm
0.500"
0.810"
0.330"
H:
Operating and Electrical Specifications
Power Supply
Temperature
Operating:
Storage:
5VDC 5% ꢃ 330mA (30mA for sensor)
0 to 70ꢀC
-20 to 70ꢀC
Humidity:
EMI:
10 - ꢂ0% RH non-condensing
CE Compliant
Shock:
Sensor Weight:
Cable:
1500G 0.5 ms half sine (Sensor)
5.0g (Sensor without cable)
Double shield. Maximum length 2m. Diameter: 3.6mm (0.142”)
Flex Life: 20 x 106 cycles ꢃ 20mm bending radius
Mechanical Information - Sensor
.272 6.91
.166 4.22
A
A
SENSOR MTG. SURFACE
SENSOR MTG SURFACE
ꢁ9.7 [ꢀ00] or 39.4 [ꢁ000]
or 78.7 [2000] .ꢀ0 [ꢁ2.7]
.13 3.4
.058 1.47
.037 0.94
.810 20.57
.083 2.11
B
.405 10.29
.24 6.2
.155 3.94
.ꢁ42 [3.6ꢁ]
CABLE DIAMETER
.334 8.5
.500 12.70
.345 8.75
All Specifications are subject to change. All data is
accurate to the best of our knowledge. MicroE
Systems is not responsible for errors.
2X
THRU.
.106 2.69
.080 2.03
C
.650 16.5
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