06 | Keysight | E4991B Impedance Analyzer - Data Sheet
Measurement Accuracy (continued)
Accuracy when open/short/load/low-loss capacitor calibration is
performed.
Condition:
Point average factor ≥ 32
–23 dBm ≤ oscillator level ≤ +1 dBm
Calibration points are same as measurement points
(User frequency mode)
Measurement is performed within ± 1 °C from the calibration temperature
|Z|, |Y|:
±(Ea + Eb) [%]
Ec
q:
±
[rad]
100
2
2
√
± (Ea + Eb) + (EcDx) [%]
L, C, X, B:
2
2
√
R, G:
± (Ea + Eb) + (EcQx) [%]
Ec
(1 + D2x)tan
D:
100
Ec
at Dx tan
< 1
±
Ec
100
±
1
Dx tan
100
Ec
especially at |Dx| ≤ 0.1
±
±
100
Ec
(1 + Q2x)tan
Q:
at Qx tan
100
Ec
< 1
Ec
100
±
1
Qx tan
100
Ec
10
Ec
especially at
≥ |Qx| ≥ 10
±Q2x
100
Definition of each parameter
Dx = Measurement value of D
Qx = Measurement value of Q
Ea = (Within ± 5 °C from the calibration temperature. Measurement accuracy applies
when the calibration is performed at 23 °C ± 5 °C. When the calibration is performed
beyond 23 °C ± 5 °C, measurement error doubles.)
at –23 dBm ≤ oscillator level ≤ 1 dBm:
0.60 [%] (1 MHz ≤ Frequency ≤ 100 MHz)
0.70 [%] (100 MHz < Frequency ≤ 500 MHz)
1.00 [%] (500 MHz < Frequency ≤ 1 GHz)
2.00 [%] (1 GHz < Frequency ≤ 1.8 GHz)
4.00 [%] (1.8 GHz < Frequency ≤ 3 GHz)
at –33 dBm ≤ oscillator level < –23 dBm:
0.65 [%] (1 MHz ≤ Frequency ≤ 100 MHz)
0.75 [%] (100 MHz < Frequency ≤ 500 MHz)
1.05 [%] (500 MHz < Frequency ≤ 1 GHz)
2.05 [%] (1 GHz < Frequency ≤ 1.8 GHz)
4.05 [%] (1.8 GHz < Frequency ≤ 3 GHz)