Parameters EPOSC ZOSC
Oscillator level
EPOSC (%)
ZOSC (mΩ)
125 mV < VOSC ≤ 250 mV
64 mV < VOSC ≤ 125 mV
32 mV < VOSC ≤ 64 mV
0.03 ꢀ (250/ VOSC - 1)
0.03 ꢀ (125/ VOSC - 1)
0.03 ꢀ (64/ VOSC - 1)
0.03 ꢀ (32/ VOSC - 1)
5 ꢀ (250/ VOSC - 1)
5 ꢀ (125/ VOSC - 1)
5 ꢀ (64/ VOSC - 1)
5 ꢀ (64/ VOSC - 1)
V
OSC ≤ 32 mV
VOSC is oscillator level in mV.
Parameters EPL YOL ZSL
Cable length
1.5 m
EPL (%)
0.02 ꢁ 3 ꢀ f/100
YOL (nS)
750 ꢀ f/100
ZSL (mΩ)
5.0
3 m
0.02 ꢁ 5 ꢀ f/100
1500 ꢀ f/100
5.0
f is frequency in MHz. If measurement cable is eꢀtended, open compensation,
short compensation, and load compensation must be performed.
Parameters YOSC YO EP ZS
Frequency
YOSC (nS)
YO (nS)
1.5
3.0
3.0
30.0
EP (%)
0.095
0.095
0.28
ZS (mΩ)
5.0
5.0
5.0
5.0
1 kHz ≤ f ≤ 200 kHz
200 kHz < f ≤ 1 MHz
1 MHz < f ≤ 2 MHz
2 MHz < f
1 ꢀ (125/ VOSC – 0.5)
2 ꢀ (125/ VOSC – 0.5)
2 ꢀ (125/ VOSC – 0.5)
20 ꢀ (125/ VOSC – 0.5)
0.28
f is frequency in Hz.
VOSC is oscillator level in mV.
Example of calculated C/G measurement accuracy
Frequency Measured
capacitance
C accuracy¹ Measured
conductance
G accuracy¹
5 MHz
1 MHz
100 kHz
10 kHz
1 kHz
1 pF
10 pF
100 pF
1 nF
0.61 %
0.32 %
0.29 %
0.32 %
0.26 %
0.11 %
0.10 %
0.10 %
0.18 %
0.11 %
0.10 %
0.10 %
0.18 %
0.11 %
0.10 %
0.10 %
0.92 %
0.18 %
0.11 %
0.10 %
≤ 3 µS
≤ 31 µS
≤ 314 µS
≤ 3 mS
≤ 628 nS
≤ 6 µS
≤ 63 µS
≤ 628 µS
≤ 628 nS
≤ 6 µS
≤ 63 µS
≤ 628 µS
≤ 628 nS
≤ 6 µS
192 nS
990 nS
9 µS
99 µS
16 nS
71 nS
624 nS
7 µS
11 nS
66 nS
619 nS
7 µS
11 nS
66 nS
619 nS
7 µS
1 pF
10 pF
100 pF
1 nF
10 pF
100 pF
1 nF
10 nF
100 pF
1 nF
10 nF
100 nF
100 pF
1 nF
≤ 63 µS
≤ 628 µS
≤ 63 nS
≤ 628 nS
≤ 6 µS
6 nS
11 nS
66 nS
619 nS
10 nF
100 nF
≤ 63 µS
1. The capacitance and conductance measurement accuracy is specified under
the following conditions:
DX = 0.1
Integration time: 1 PLC
Test signal level: 30 mVrms
At four-terminal pair port of MFCMU
9
HP [ HEWLETT-PACKARD ]
