HV-SPGU (high voltage semiconductor pulse generator unit) module specification
Specifications
Pulse/DC output voltage and accuracy
Output voltage (Vout) 50 Ω load
Open load
Number of output channels:
2 channels per module
–20 V to ꢁ20 V
–40 V to ꢁ40 V
Modes: pulse, constant, and freerun
Accuracy¹
Open load
(0.5 % ꢁ 50 mV)
0.2 mV ( 10 V range)
0.8 mV ( 40 V range)
0.4 mV ( 10 V range)
1.6 mV ( 40 V range)
SMA
Standard pulse mode:
• Two level pulse
• Three level pulse per one channel
• Pulse period: 30 ns to 10 s
Amplitude resolution 50 Ω load
Open load
Output connectors
Source impedance
Short circuit current
Delay range: 0 s to 9.99 s
Delay resolution: 2.5 ns (minimum)
Output count: 1 to 1,000,000
Voltage monitor minimum sampling
period: 5 μs
50 Ω²
800 mA peak (400 mA average³)
(5 % ꢁ 20 mV)
Overshoot/
50 Ω load
pre-shoot/ringing4
Output limit
1. At 1 µs after completing transition.
2. Typical ( 1 %)
Monitoring over current limit
Trigger output:
Level: TTL
3. This value is specified under the following condition: [(Number of installed HV-SPGUs) ꢀ 0.2 A]
ꢁ [DC current output by all modules (including HV-SPGUs)] < 3.0 A
Timing: Synchronized with pulse period
Trigger width:
4. Following the specified condition with transition time.
Pulse period ꢀ 1/2 (pulse period ≤ 10 µs)
Maꢀimum 5 µs (pulse period > 10 µs)
Pulse range and pulse parameter¹
Frequency range
Pulse period
0.1 Hz to 33 MHz
30 ns to 10 s
10 ns
SPGU supplemental information
Programmable range
Resolution
Minimum
Accuracy
Programmable range
Resolution
Pulse width jitter: 0.001 % ꢁ150 ps
Pulse period jitter: 0.001 % ꢁ150 ps
Maꢀimum slew rate: 1000 V/µs (50 Ω load)
Noise: 10 mVrms (at DC output)
100 ns³
1 % ( 0.01 % ²)
10 ns to (period – 10 ns)
2.5 ns (Tr and Tf ≤ 8 µs)
10 ns (Tr or Tf > 8 µs)
50 ns (25 ns typical)³
(3 % ꢁ 2 ns)
Width
Advanced feature:
Voltage monitor: The HV-SPGU has a
voltage monitor function to measure the
voltage at the DUT terminal.
Minimum
Accuracy
Programmable range
Transition time5
(Tr and Tf)
8 ns to 400 ms
Measurement accuracy (open load):
(0.1 % of reading ꢁ 25 mV)
Measurement resolution: 50 μV
Note: Specified at 1 PLC (20 ms = (5 μs
sample ꢁ 5 μs interval) ꢀ 2000 samples.)
Voltage compensation: The HV-SPGU
can measure the impedance of DUT and
adjust the output voltage according to
the DUT impedance.
Resolution
2 ns (Tr and Tf ≤ 8 µs)
8 ns (Tr or Tf > 8 µs)
< 15 ns³
20 ns (Vamp ≤ 10 V)
30 ns (Vamp ≤ 20 V)
60 ns (Vamp > 20 V)
–5 % to 5 % ꢁ 10 ns (Vamp ≤ 10 V)
–5 % to 5 % ꢁ 20 ns (Vamp ≤ 20 V)
< 100 µs
Minimum (typical)
Minimum
Accuracy
Output relay
Open/close
switching time4
1. Unless otherwise stated, all specifications assume a 50 Ω termination.
ALWG (arbitrary linear
2. Typical minimum. This is supplemental information.
waveform generator) function
3. This is specified at Vamp ≤ 10 V.
4. The time it takes the open state relay to open or close.
5. The time from 10 % to 90 % of Vamp which is the amplitude of output pulse.
Arbitrary linear waveform generator
(ALWG) mode:
• Output compleꢀ waveform per one
channel of HV-SPGU
• Define multi-level pulse and multi-pulse
waveform including open state pulse
with ALWG GUI editor
Pulse waveform
Tperiod
Twidth
Tdelay
Vpeak
• Sequential pulse waveform from
user-defined pulse waveform
• 1024 points per one channel
90%
90%
Vamp
10%
Tr
10%
Tf
• Programmable timing range:
10 ns to 10 s, 10 ns resolution
Vbase
11