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HSH3500PILO 参数 Datasheet PDF下载

HSH3500PILO图片预览
型号: HSH3500PILO
PDF下载: 下载PDF文件 查看货源
内容描述: 灯光刻 [Lamps for Photolithography]
分类和应用:
文件页数/大小: 2 页 / 47 K
品牌: PERKINELMER [ PERKINELMER OPTOELECTRONICS ]
 浏览型号HSH3500PILO的Datasheet PDF文件第1页  
HSH3500PILO  
Physical Specifications  
Operational Specifications  
Description  
Power  
Nominal  
Range  
Description  
Arc Gap  
Specification  
3500 watts  
152 amps (DC)  
23 volts (DC)  
3%  
4.5 mm (max)  
Current  
135-175 amps (DC)  
20-26 volts (DC)  
Anode Base  
Cathode Base  
40 mm Dia (M6)  
32.5 mm Dia (M12)  
Voltage  
Current Ripple  
Temperature (at base)  
Lifetime  
220ºC (max)  
1500 hours  
Spectral Output  
100  
90  
80  
70  
60  
50  
40  
30  
20  
10  
0
Dimensions  
ANODE (+)  
END UP  
250  
300  
350  
400  
450  
500  
550  
600  
650  
700  
750  
Wavelength (nm)  
324  
Max  
Typical Performance Graph  
100  
90  
80  
70  
60  
50  
40  
30  
20  
10  
0
155.5  
CATHODE (-)  
END DOWN  
Ø81.5  
0
200  
400  
600  
800  
1000  
1200  
1400  
All dimensions are in millimeters.  
Notes  
Hours of Operation  
Part Number References  
Used In  
ASML 5500 / 200B, /250C  
1. Lamp must be operated with anode end up and  
cathode end down. Inclination of lamp axis to verti-  
cal must not exceed 10º.  
SUV-3500-PIL  
Replaces  
HBO-3500-W/PI  
PerkinElmer welcomes inquiries about special lamps. We would be pleased to discuss the requirements of your application and the feasibility of  
designing a lamp specifically suited to your needs.  
For more information e-mail us at opto@perkinelmer.com or visit our web site at www.perkinelmer.com/opto.  
All values are nominal; specifications subject to change without notice.  
USA:  
Europe:  
Asia:  
PerkinElmer Optoelectronics  
44370 Christy St.  
Fremont, CA 94538  
Phone: (510) 979-6500  
Fax: (510) 687-1140  
PerkinElmer Optoelectronics GmbH  
Wenzel-Jaksch-Str. 31  
65199 Wiesbaden  
Germany  
Phone: +49 611 492 0  
Fax: +49 611 492 177  
PerkinElmer Optoelectronics  
47 Ayer Rajah Crescent #06-12  
Singapore 139947  
Phone: +65 775 2022  
Fax: +65 775 1008  
.
© 2000 PerkinElmer inc. All rights reserved.  
DS-193 Rev C 1101  
www.perkinelmer.com/opto